Finite - Difference Large - Displacement Gas - Film

To numerically solve squeezed gas-lm forces in a narrow air-gap between moving surfaces, an electrical-equivalent circuit mesh is formed that realizes the nonlinear, modiied Reynolds equation at discrete surface positions. The model is usable when investigating gas-lm forces for large gap displacements and pressure variations. It is also usable as a reference when simple, compact models for squeezed gas-lm forces are developed. An accelerometer model utilizing the new gas-lm model has been constructed. The time-domain large-displacement response of an accelerometer is demonstrated with a circuit simulation.